{
"Summary": {
  "Slices": 31,
  "InitialPositionList": [
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -5028.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -5028.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -5028.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -5028.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -5028.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -4749.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -4749.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -4749.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -4749.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -4749.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -4471
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -4471
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -4471
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -4471
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -4471
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -4192.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -4192.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -4192.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -4192.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -4192.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -3913.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -3913.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -3913.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -3913.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -3913.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          933.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          933.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          933.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          933.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          933.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          1212.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          1212.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          1212.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          1212.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          1212.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          1491
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          1491
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          1491
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          1491
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          1491
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          1769.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          1769.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          1769.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          1769.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          1769.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          2048.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          2048.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          2048.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          2048.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          2048.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          19329.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          19329.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          19329.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          19329.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          19329.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          19608.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          19608.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          19608.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          19608.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          19608.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          19887
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          19887
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          19887
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          19887
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          19887
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          20165.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          20165.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          20165.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          20165.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          20165.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          20444.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          20444.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          20444.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          20444.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          20444.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          26393.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          26393.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          26393.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          26393.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          26393.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          26672.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          26672.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          26672.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          26672.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          26672.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          26951
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          26951
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          26951
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          26951
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          26951
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          27229.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          27229.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          27229.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          27229.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          27229.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          27508.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          27508.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          27508.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          27508.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          27508.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          27725.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          27725.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          27725.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          27725.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          27725.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28004.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28004.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28004.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28004.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28004.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28283
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28283
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28283
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28283
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28283
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28561.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28561.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28561.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28561.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28561.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28840.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28840.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28840.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28840.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28840.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          21470.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          21470.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          21470.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          21470.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          21470.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          21749.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          21749.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          21749.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          21749.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          21749.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          22028
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          22028
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          22028
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          22028
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          22028
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          22306.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          22306.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          22306.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          22306.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          22306.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          22585.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          22585.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          22585.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          22585.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          22585.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          3179.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          3179.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          3179.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          3179.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          3179.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          3458.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          3458.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          3458.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          3458.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          3458.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          3737
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          3737
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          3737
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          3737
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          3737
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          4015.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          4015.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          4015.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          4015.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          4015.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          4294.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          4294.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          4294.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          4294.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          4294.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -2228.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -2228.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -2228.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -2228.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -2228.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1949.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1949.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1949.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1949.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1949.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1671
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1671
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1671
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1671
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1671
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1392.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1392.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1392.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1392.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1392.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1113.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1113.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1113.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1113.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1113.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -5758.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -5758.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -5758.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -5758.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -5758.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -5479.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -5479.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -5479.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -5479.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -5479.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -5201
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -5201
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -5201
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -5201
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -5201
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -4922.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -4922.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -4922.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -4922.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -4922.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -4643.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -4643.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -4643.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -4643.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -4643.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          95.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          95.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          95.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          95.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          95.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          374.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          374.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          374.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          374.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          374.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          653
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          653
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          653
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          653
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          653
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          931.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          931.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          931.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          931.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          931.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          1210.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          1210.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          1210.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          1210.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          1210.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          19586.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          19586.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          19586.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          19586.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          19586.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          19865.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          19865.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          19865.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          19865.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          19865.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          20144
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          20144
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          20144
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          20144
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          20144
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          20422.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          20422.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          20422.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          20422.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          20422.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          20701.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          20701.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          20701.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          20701.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          20701.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          24663.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          24663.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          24663.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          24663.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          24663.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          24942.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          24942.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          24942.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          24942.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          24942.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          25221
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          25221
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          25221
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          25221
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          25221
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          25499.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          25499.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          25499.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          25499.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          25499.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          25778.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          25778.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          25778.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          25778.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          25778.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          27951.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          27951.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          27951.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          27951.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          27951.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          28230.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          28230.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          28230.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          28230.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          28230.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          28509
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          28509
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          28509
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          28509
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          28509
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          28787.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          28787.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          28787.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          28787.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          28787.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          29066.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          29066.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          29066.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          29066.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          29066.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22161.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22161.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22161.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22161.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22161.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22440.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22440.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22440.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22440.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22440.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22719
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22719
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22719
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22719
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22719
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22997.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22997.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22997.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22997.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22997.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          23276.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          23276.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          23276.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          23276.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          23276.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4146.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4146.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4146.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4146.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4146.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4425.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4425.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4425.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4425.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4425.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4704
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4704
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4704
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4704
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4704
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4982.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4982.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4982.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4982.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4982.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          5261.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          5261.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          5261.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          5261.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          5261.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1982.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1982.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1982.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1982.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1982.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1703.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1703.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1703.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1703.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1703.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1425
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1425
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1425
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1425
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1425
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1146.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1146.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1146.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1146.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1146.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -867.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -867.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -867.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -867.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -867.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_004",
      "GridRowIndex": 4
    }
  ],
  "Interval_ms": 0,
  "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
  "UserName": "Nikon",
  "Depth": 2,
  "PixelType": "GRAY16",
  "Time": "2019-12-16 08:14:08 -0500",
  "Date": "2019-12-16",
  "z-step_um": 1,
  "MetadataVersion": 10,
  "PositionIndex": 354,
  "SlicesFirst": true,
  "ChContrastMin": [
    0,
    0,
    0,
    0,
    0
  ],
  "Width": 2048,
  "PixelAspect": 1,
  "MicroManagerVersion": "1.4.23 20190321",
  "ROI": [
    0,
    0,
    2048,
    2048
  ],
  "ChNames": [
    "Il-G",
    "Il-T",
    "Il-A",
    "Il-C",
    "P-DIC"
  ],
  "IJType": 1,
  "GridRow": 0,
  "Comment": "",
  "Height": 2048,
  "GridColumn": 0,
  "Prefix": "geneseq_1",
  "PixelSize_um": 0.16,
  "Frames": 1,
  "CameraTimeout": 20000,
  "BitDepth": 16,
  "KeepShutterOpenChannels": false,
  "Source": "Micro-Manager",
  "Channels": 5,
  "ComputerName": "ZadorConfocal1",
  "CustomIntervals_ms": [],
  "KeepShutterOpenSlices": false,
  "ChColors": [
    -13369345,
    -256,
    -52225,
    -1,
    -1
  ],
  "TimeFirst": false,
  "ChContrastMax": [
    65536,
    65536,
    65536,
    65536,
    65536
  ],
  "Positions": 400,
  "Directory": "F:\\20191216M1cdhs"
},
"FrameKey-0-0-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b448a824-48a6-4c29-a1bf-fa29089c7743",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17503941,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:08 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c622d102-8c6d-4e4a-9ba0-d569df8d5bba",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17504216,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:09 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6ac21615-e45d-4221-ae3b-ef5b9b0fdf6d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17504494,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:09 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bf046fa8-18cc-49de-85ed-9feacef1704e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17504770,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:09 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a2860e1c-2388-425d-a5de-6c596625f15a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17505047,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:09 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "83cae858-0506-4f79-b752-38f68c714012",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17505324,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:10 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e7452851-faad-4e0f-86b0-4807f7037375",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17505615,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:10 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e796a569-f0c2-4c24-971d-64a8652a7397",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17505892,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:10 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ad3b8f58-6176-4de5-83c4-b85c48278482",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17506168,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:10 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "558d1103-c224-499b-b5aa-77a6bff3b845",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17506444,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:11 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3cbf24ba-2340-4bbc-9c15-b6b7b86db71c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17506719,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:11 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "375233db-f23a-4d33-bfdd-6b43a44dee5b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17506994,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:11 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d0392077-ecec-47ad-aef5-29f3bd33a26e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17507268,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:12 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ff5025d9-cb63-4a8c-8dfc-46867b79f887",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17507544,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:12 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8bc07f9d-2df7-4ee1-94e9-32447f0110a1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17507831,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:12 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b370ea06-927e-485a-9c7c-133195bed7e5",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17508109,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:12 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "70815c85-8e7c-488c-b0c2-a581a80487db",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17508385,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:13 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ac25e6bd-1932-4a39-8c78-8fe1a48df770",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17508661,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:13 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "53729ff8-1488-4a7b-a9e9-c092262377d0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17508937,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:13 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1dd1a661-05ec-4309-8f34-c8933162fd75",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17509214,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9d37e62d-5c2e-435f-928e-18e845023e23",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17509728,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3e11810c-9ce1-41d3-a189-c09253fe0516",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17510005,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a762e044-369c-4715-b42d-a57f64e8d49b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17510279,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:15 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f2c3d0f7-2607-4f65-be5a-7a2f9160c99e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17510568,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:15 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fca69fb9-b0b3-4ef7-9193-8e321837b153",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17510846,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:15 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "76416996-a779-4cb4-a37d-bc93b37f64ac",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17511125,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:15 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a86f6b97-8321-45e6-8b9c-6d6dfe3bf496",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17511401,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:16 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ec95f932-2d8d-49c3-bdb4-603892f8f28f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17511685,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:16 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a8836f65-5fbd-4b8c-91dd-da95ac5d06b8",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17511961,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:16 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "906a70b4-bfde-4c05-bdcb-cc1e02b22cbc",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17512238,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:17 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "13556e4b-6b03-4fc9-b4b5-631721d08dc4",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17512527,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:17 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "74384e70-0929-4adb-a980-454e1c6ee3da",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17513442,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7324c43b-cfb9-47cb-abed-655452687347",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17513611,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "901a95c1-7b95-4659-bb96-7d111029ce81",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17513777,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7470eaef-450c-452e-aacf-ec650e7dcf89",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17513944,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8b8c2471-b372-4090-88c1-539289ab31c1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17514112,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4449938a-e277-454b-a300-63fc1f40bd0a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17514277,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b08df6f2-340a-46f1-8569-ee1bdcb004d0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17514442,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "be752d22-c8d7-4537-9340-d5dd5343b249",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17514608,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "813861ea-bf5f-43be-9f47-1c3834ae008c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17514777,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2d2485f9-a4b1-4a9f-a4ac-6a3998483234",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17514945,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8fb787b0-f97e-4da1-a4b5-9f69bb2cc3bc",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17515111,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2292dad7-32eb-4a78-ba14-098ed0d4a20d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17515291,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fa9c66f4-22df-4ed6-8fd3-38425b4775a9",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17515457,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6c45e940-4172-4ad4-9299-46f6501e8500",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17515624,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8dccfdba-23f9-4b77-80d5-167d4d510e82",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17515790,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c99ae9c0-7722-487d-ae6b-19c502ab3fa7",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17515955,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8aa1d885-cd83-4a84-87c6-35020b12acd4",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17516123,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3ebb7aa4-7cd5-4a5b-b7cc-ff2d34ce851f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17516290,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "191f6131-8e12-49c0-923f-66707ac27003",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17516463,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a279b85d-899e-43f4-a51f-442cee5dc569",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17516629,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1a1e264e-f8bc-4e5c-914b-4e6b46bae1d8",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17516794,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2b3b6fe9-38ff-4d67-8234-bc1b2e63c325",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17516977,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "efbdec3d-0ad4-4247-9418-46c11513e8bf",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17517142,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8763320e-cfa7-44dc-b78d-20373f089090",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17517308,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:22 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3984f06a-75c3-447d-9aab-da61de0cc659",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17517474,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:22 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "983c7ef9-fc25-4b48-8a11-b3786f9f8f2f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17517640,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:22 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "10ab3ba5-8d93-4d26-9fa7-64301fcddaed",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17517815,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:22 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8dc9a55c-d54e-4052-87d3-9d9083afb38c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17517981,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:22 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5d217053-da1c-4ff5-b736-b117738b0c98",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17518146,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:22 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b6fab3ab-9c83-4925-8a13-fee9cebc41f5",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17518311,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:23 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2513e475-d6a7-495f-9103-335fa9814edb",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17518477,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:23 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "14d29388-2478-4b28-91de-fde34bb4a93a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17519454,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:24 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6fb951f8-e6c6-40c5-8e89-0dcd7c7d88b1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17519721,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:24 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e61ac30d-89b0-419e-a184-ab67d3017ef1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17519987,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:24 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "054e49d9-2417-4a27-a1c7-5bf0501214e2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17520256,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:25 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "32766a4f-6c59-4b83-bdea-e6557dae0a96",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17520525,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:25 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f7117aee-e206-47ca-a802-adf8df860927",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17520791,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:25 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ff966cbe-dc5e-4571-ba2c-ccc672ba00ed",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17521058,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:25 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fd3a7c9b-a9f5-4aa8-acbb-78dee98db428",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17521323,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:26 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e9feca59-faba-446d-aad4-8a3e54b5e10f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17521595,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:26 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d8b0c466-98df-4da8-a1ee-500f43b8bb73",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17521864,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:26 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c727f674-7ce2-4d95-8d79-6106a9fe8fe4",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17522129,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:26 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bdde66da-2fe4-47f1-93f7-cb1980d7276f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17522395,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:27 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d7d9f524-bd54-4e24-944d-fd45ad6f5035",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17522682,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:27 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0c036e99-9fc9-48a2-a5e6-f3c88cde0f0c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17522948,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:27 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6eae219e-c6b8-41a1-933c-b9968fe6aabf",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17523216,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:28 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "528ffba1-849a-4941-a085-8fd17e60c970",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17523482,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:28 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5ac1abbd-874b-4809-b9c0-4c6fdccf4792",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17523749,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:28 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c87442d7-4560-44e2-9557-b4aba194ed98",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17524018,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:28 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f579b3c1-ccd8-4619-96d2-cb29b9b3dc48",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17524298,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:29 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fb98391f-8f0c-47d0-9ef9-e651b9cbd57b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17524565,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:29 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b1c7ba85-e5f8-44d7-ae6a-76f8bf82dac2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17524830,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:29 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "47de6eb3-b273-445c-8e6c-fd5910d680d4",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17525097,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:29 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "da09e066-1487-402c-b3b3-d53457d3af5c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17525365,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:30 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4f229d34-e3e9-4562-85b7-c93c154ccf57",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17525630,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:30 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0f711bfa-b968-42b1-98d8-adfb09895c73",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17525895,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:30 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "098c14ad-b11f-4868-87f8-ae7051a1c9d6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17526162,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:30 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2783600c-99ec-4c83-8468-7ec0d8502f3d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17526428,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:31 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4a3e14ae-8f02-482a-b4e9-edc0a445bc4d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17526699,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:31 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8e33ef1d-485a-439b-9e8f-bbbc636e5bd3",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17526983,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:31 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "63cd6e07-4382-44de-9f1f-84fdaef209d6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17527250,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:32 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7c652313-c9b8-42e3-98ce-f84c57ad9662",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17527517,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:32 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "cb825852-1ef4-4749-b194-4335f971195d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17528138,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:32 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9620a7b5-733f-41f0-80d7-3744de17efbe",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17528477,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:33 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "84bab09c-cd79-4e05-bfb4-10c4474f1e60",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17528814,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:33 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "34aeb25d-bf74-417b-977a-ad0b3cc43c72",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17529150,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:33 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c52c8375-d400-44f2-99db-aa48f661b452",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17529486,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:34 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a832ee44-900a-4a3f-ad8c-3b28cef436a1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17529825,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:34 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1ddc7d14-4487-4d1d-92bf-458e33df1e19",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17530163,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:34 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5c0b1e60-c201-4d13-b356-3749508115c2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17530508,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:35 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "60dff1fc-ae42-4b8b-b0ba-b82a42b3a10b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17530865,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:35 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5c2c397a-b1e0-4374-9dd9-427e7540cb39",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17531202,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:35 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c7aef1ab-7072-4603-ade4-d38f54c945ea",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17531540,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:36 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d530548d-e093-41cf-8df7-92f93ef81d11",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17531876,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:36 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6669fb30-acd2-49ae-9d2d-9df065b1f3a5",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17532212,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:37 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0d27fb08-e53a-428b-b128-2910359caf56",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17532549,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:37 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "46e5c596-2639-4f34-98d2-aa5937b74e3f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17532912,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:37 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "acf6c23d-2b2c-45fd-b526-bf3a76f3d107",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17533248,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:38 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bc58a05a-c183-4261-856a-5feb789e8e22",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17533584,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:38 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7f792abf-675d-4c55-818a-e3e3d21fc6ed",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17533925,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:38 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a2daf2c9-61c7-4bb3-82cf-b2f0112d1429",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17534262,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:39 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0b5f4f8f-6e3f-4c62-bba3-ad5881ddb345",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17534598,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:39 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "632ceac0-5629-4dee-b2ca-32c1fd4a9926",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17534939,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:39 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b2f13bd0-719f-4480-9819-9ae8d79edee1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17535276,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:40 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6eb4aaa1-6536-40f7-b431-c0843ed8686e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17535616,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:40 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "dec16df2-3f36-42d9-ba2f-96a6b1af5368",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17535953,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:40 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e4951dbf-ba41-4d89-b73c-629c3def00bd",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17536287,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:41 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "54d1a983-a01f-48e2-9f16-baca0a0a3ab6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17536625,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:41 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1f514890-93f8-4026-8997-5c1c60b924e0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17536966,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:41 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "aec7ec3d-8b35-428e-a410-0312c8ce70b4",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17537318,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:42 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "47fdeeee-9190-410f-9662-bbf07c1e8a16",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17537653,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:42 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ddc7e17e-183a-433e-8294-8983d68f6af9",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17537990,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:42 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b2b5b38e-42b0-40fd-979d-9c99a3ebec1c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17538328,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:43 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "82f07431-476d-436c-b31e-5cd9af763ba2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17539424,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:44 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d14676da-5059-4c84-9761-a7877bec8c9f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17539839,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:44 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "cc49420a-5fc1-4488-8094-4e0d37525e88",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17540288,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:45 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0cec53bd-50a5-451d-9ec0-c6670588e535",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17540721,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:45 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "98b79dec-d410-461e-b61e-a219c8261e1c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17541151,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:45 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4cbe9b83-4ae1-46f3-9b87-d7ca348246dc",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17541567,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:46 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e33969aa-5c26-4a8c-a6db-2a8087bd16f8",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17542000,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:46 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "afdc2080-b83c-4c3c-9104-2534f4c297f6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17542417,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:47 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "cbd82b7e-a5fb-4821-8710-a9d5a68017c0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17542831,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:47 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a7691eb8-1aee-47bf-96c8-7eb69093a1c6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17543262,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:48 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "16df85a2-5633-4b18-aca2-2154d466f865",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17543711,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:48 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8de971a0-5461-4a94-9740-aa1ae7b4f58b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17544126,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:48 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8448c22c-5701-47ac-b17f-ea82ce16ff09",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17544558,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:49 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f51a53af-2778-4728-86ba-2ba8149462bd",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17544990,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:49 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b8f1dc8e-4d72-4ac8-98ff-bf601b0925dc",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17545423,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:50 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e0aa36d4-9842-410d-b459-bc97c5220674",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17545854,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:50 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a321ecd2-861a-4326-a81f-8c20c1829af1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17546303,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:51 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3da46cd5-d37d-45ea-9ebc-2c9bcaf6c728",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17546733,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:51 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2d7b4db2-b296-462e-b163-e4b1f09e6e21",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17547165,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:51 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d1e8528d-4741-4e15-8332-f351f7765085",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17547597,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:52 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "719d9745-b373-43c3-b8a0-08380e283b73",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17548029,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:52 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "04249ee8-43f2-4e7a-b4d4-9744fc9e5800",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17548445,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:53 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "804d8e85-1a64-4211-a533-467b9479eb6a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17548888,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:53 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1cc19f21-e17e-4389-8efd-ffa2b629437b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17549325,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c9efbf0e-010c-4231-806a-5a92be75a072",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17549741,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "08900c80-d906-4764-b9e5-3d7142dc7437",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17550188,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3060dbff-25df-4373-8dc1-c0a03c48c176",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17550621,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:55 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fe6b9095-fd6a-4fff-b464-95279f0d0cab",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17551068,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:55 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c38ab5fd-49b6-4102-96df-728bcaf8aac6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17551485,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:56 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c1695cad-7767-4646-a9fa-c2af22bc2c16",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17551916,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:56 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fd0c4332-47fd-4ba6-a8c3-fa715506948e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 354,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 08:14:08 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 354,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 17552332,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos14_004_000",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 8656.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 08:14:57 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 4146.944,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
}
}